| Rank | 12283 |
|---|---|
| Abbreviated Journal | J VAC SCI TECHNOL B |
| Publisher | A V S AMER INST PHYSICS |
| Year | 2024 |
| ISSN | 2166-2746 |
| eISSN | 2166-2754 |
| Total Cites | 6714 |
| Total Articles | 183 |
| Citable Items | 185 |
| Cited Half-Life | 15.4 |
| Citing Half-Life | 9.2 |
| Impact Factor | 1.200 |
| 5-Year JIF | 1.300 |
| JIF Without Self-Cites | 1.100 |
| JCI | 0.260 |
| JIF Quartile | Q4 |
| JIF Rank | 289/366 |