| Rank | 7872 |
|---|---|
| Abbreviated Journal | J VAC SCI TECHNOL A |
| Publisher | A V S AMER INST PHYSICS |
| Year | 2024 |
| ISSN | 0734-2101 |
| eISSN | 1520-8559 |
| Total Cites | 11789 |
| Total Articles | 323 |
| Citable Items | 329 |
| Cited Half-Life | 11.4 |
| Citing Half-Life | 9.8 |
| Impact Factor | 2.100 |
| 5-Year JIF | 2.700 |
| JIF Without Self-Cites | 1.900 |
| JCI | 0.470 |
| JIF Quartile | Q3 |
| JIF Rank | 15/23 |